SiC sobusitireti
Apejuwe
Ohun alumọni carbide (SiC) ni a alakomeji yellow ti Group IV-IV, o jẹ nikan ni idurosinsin ri to yellow ni Group IV ti awọn igbakọọkan Table, O jẹ ẹya pataki semikondokito.SiC ni igbona ti o dara julọ, ẹrọ, kemikali ati awọn ohun-ini itanna, eyiti o jẹ ki o jẹ ọkan ninu awọn ohun elo ti o dara julọ fun ṣiṣe iwọn otutu giga, igbohunsafẹfẹ giga, ati awọn ẹrọ itanna giga, SiC tun le ṣee lo bi ohun elo sobusitireti. fun GaN-orisun bulu ina-emitting diodes.Ni lọwọlọwọ, 4H-SiC jẹ awọn ọja akọkọ ni ọja, ati pe iru adaṣe ti pin si iru idabobo ologbele ati iru N.
Awọn ohun-ini
| Nkan | 2 inch 4H N-iru | ||
| Iwọn opin | 2inch (50.8mm) | ||
| Sisanra | 350+/-25um | ||
| Iṣalaye | ni pipa 4.0˚ si ọna <1120> ± 0.5˚ | ||
| Primary Flat Iṣalaye | <1-100> ± 5° | ||
| Atẹle Flat Iṣalaye | 90.0˚ CW lati Alakọbẹrẹ ± 5.0˚, Si koju soke | ||
| Primary Flat Gigun | 16 ± 2.0 | ||
| Secondary Flat Gigun | 8 ± 2.0 | ||
| Ipele | Iwọn iṣelọpọ (P) | Ipele iwadi (R) | Idiwon ite (D) |
| Resistivity | 0.015 ~ 0.028 Ω · cm | <0.1 Ω·cm | <0.1 Ω·cm |
| Iwuwo Micropipe | ≤ 1 micropipes/cm² | ≤ 1 0 micropipes/cm² | ≤ 30 micropipes/cm² |
| Dada Roughness | Si koju CMP Ra <0.5nm, C Oju Ra <1 nm | N/A, agbegbe lilo> 75% | |
| TTV | <8 awo | < 10um | < 15 um |
| Teriba | <±8 um | <±10um | <± 15um |
| Ijagun | < 15 um | < 20 um | < 25 um |
| Awọn dojuijako | Ko si | Akopọ ipari ≤ 3 mm | Ipari apapọ ≤10mm, |
| Scratches | ≤ 3 scratches, akojo | ≤ 5 scratches, akojo | ≤ 10 scratches, akojo |
| Hex farahan | o pọju 6 awo, | o pọju 12 awo, | N/A, agbegbe lilo> 75% |
| Awọn agbegbe Polytype | Ko si | Agbegbe akojọpọ ≤ 5% | Agbegbe akojọpọ ≤ 10% |
| Kokoro | Ko si | ||
